Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas

Title
Benchmark experiments of the power law parametrization of the effective ion collecting area of a planar Langmuir probe in low temperature plasmas
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 2, Pages 024001
Publisher
IOP Publishing
Online
2022-01-20
DOI
10.1088/1361-6595/ac4d03

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