Power law fitting of the ion saturation current and the three-temperature Maxwellian EEDF in a multi-dipole confined hot cathode discharge: an experimental revisitation

标题
Power law fitting of the ion saturation current and the three-temperature Maxwellian EEDF in a multi-dipole confined hot cathode discharge: an experimental revisitation
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 31, Issue 4, Pages 045002
出版商
IOP Publishing
发表日期
2022-03-11
DOI
10.1088/1361-6595/ac5c61

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