Atomic structures and electronic properties of different interface types at Al/c-SiO2 interfaces

Title
Atomic structures and electronic properties of different interface types at Al/c-SiO2 interfaces
Authors
Keywords
Al/c-SiO, 2, interface, Dielectric breakdown, Virtual oxide thinning, First-principle
Journal
APPLIED SURFACE SCIENCE
Volume 578, Issue -, Pages 151932
Publisher
Elsevier BV
Online
2021-11-19
DOI
10.1016/j.apsusc.2021.151932

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