Study on the processing outcomes of the atomic force microscopy tip-based nanoscratching on GaAs
出版年份 2021 全文链接
标题
Study on the processing outcomes of the atomic force microscopy tip-based nanoscratching on GaAs
作者
关键词
Atomic force microscopy, Naonscratching, Single crystal gallium arsenide, Subsurface damage
出版物
Journal of Manufacturing Processes
Volume 70, Issue -, Pages 238-247
出版商
Elsevier BV
发表日期
2021-09-03
DOI
10.1016/j.jmapro.2021.08.033
参考文献
相关参考文献
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