Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide
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Title
Fabrication of polycrystalline silicon thin films by gold-induced crystallization of amorphous silicon suboxide
Authors
Keywords
Thin films, Phase transformation, Gold-induced crystallization, Polycrystalline silicon, Silicon suboxide
Journal
VACUUM
Volume 192, Issue -, Pages 110462
Publisher
Elsevier BV
Online
2021-07-18
DOI
10.1016/j.vacuum.2021.110462
References
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Related references
Note: Only part of the references are listed.- Metal-induced layer exchange of group IV materials
- (2020) Kaoru Toko et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
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- Au induced crystallization and layer exchange in a -Si/Au thin film on glass below and above the eutectic temperature
- (2017) Ch. Kishan Singh et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
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- (2017) P. Bellanger et al. THIN SOLID FILMS
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- (2012) Masami Aono et al. JOURNAL OF NON-CRYSTALLINE SOLIDS
- Au-Induced Low-Temperature (∼250°C) Crystallization of Si on Insulator Through Layer-Exchange Process
- (2011) Jong-Hyeok Park et al. ELECTROCHEMICAL AND SOLID STATE LETTERS
- Heat- and electron-beam-induced transport of gold particles into silicon oxide and silicon studied by in situ high-resolution transmission electron microscopy
- (2008) J. Biskupek et al. Microscopy
- Gold-enhanced oxidation of MBE-grown silicon nanowires
- (2008) C C Büttner et al. SEMICONDUCTOR SCIENCE AND TECHNOLOGY
- In-situ X-ray Diffraction study of Metal Induced Crystallization of amorphous silicon
- (2007) W. Knaepen et al. THIN SOLID FILMS
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