Fabrication of polycrystalline silicon thin films from a-SiOx via the inverted aluminum-induced layer exchange process

Published 2019 View Full Article

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Title
Fabrication of polycrystalline silicon thin films from a-SiOx via the inverted aluminum-induced layer exchange process
Authors
Keywords
-
Journal
MATERIALS LETTERS
Volume 261, Issue -, Pages 127086
Publisher
Elsevier BV
Online
2019-12-02
DOI
10.1016/j.matlet.2019.127086

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