Elastic loading enhanced NH3 sensing for surface acoustic wave sensor with highly porous nitrogen doped diamond like carbon film
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Title
Elastic loading enhanced NH3 sensing for surface acoustic wave sensor with highly porous nitrogen doped diamond like carbon film
Authors
Keywords
N doped DLC, Surface acoustic wave (SAW), NH, 3, gas sensor, Elastic modulus
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 344, Issue -, Pages 130175
Publisher
Elsevier BV
Online
2021-05-27
DOI
10.1016/j.snb.2021.130175
References
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