Elastic loading enhanced NH3 sensing for surface acoustic wave sensor with highly porous nitrogen doped diamond like carbon film
出版年份 2021 全文链接
标题
Elastic loading enhanced NH3 sensing for surface acoustic wave sensor with highly porous nitrogen doped diamond like carbon film
作者
关键词
N doped DLC, Surface acoustic wave (SAW), NH, 3, gas sensor, Elastic modulus
出版物
SENSORS AND ACTUATORS B-CHEMICAL
Volume 344, Issue -, Pages 130175
出版商
Elsevier BV
发表日期
2021-05-27
DOI
10.1016/j.snb.2021.130175
参考文献
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