NH 3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO 2 , TiO 2 , and SiO 2 -TiO 2 composite films

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Title
NH 3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO 2 , TiO 2 , and SiO 2 -TiO 2 composite films
Authors
Keywords
SAW sensor, Hydroxyl groups, Mass loading, Elastic modulus
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 254, Issue -, Pages 1165-1173
Publisher
Elsevier BV
Online
2017-07-29
DOI
10.1016/j.snb.2017.07.195

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