Molecular beam epitaxy growth and characterization of AlGaN epilayers in nitrogen-rich condition on Si substrate
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Title
Molecular beam epitaxy growth and characterization of AlGaN epilayers in nitrogen-rich condition on Si substrate
Authors
Keywords
AlGaN epilayer, Si, Nitrogen-rich, Nitrogen-polar, Molecular beam epitaxy
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 135, Issue -, Pages 106099
Publisher
Elsevier BV
Online
2021-07-21
DOI
10.1016/j.mssp.2021.106099
References
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