Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System
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Title
Diffusion Barrier Performance of AlCrTaTiZr/AlCrTaTiZr-N High-Entropy Alloy Films for Cu/Si Connect System
Authors
Keywords
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Journal
Entropy
Volume 22, Issue 2, Pages 234
Publisher
MDPI AG
Online
2020-02-20
DOI
10.3390/e22020234
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