Multi-component AlCrTaTiZrMo-nitride film with high diffusion resistance in copper metallization

Title
Multi-component AlCrTaTiZrMo-nitride film with high diffusion resistance in copper metallization
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 748, Issue -, Pages 258-264
Publisher
Elsevier BV
Online
2018-03-10
DOI
10.1016/j.jallcom.2018.03.084

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