Ru incorporation on marked enhancement of diffusion resistance of multi-component alloy barrier layers

Published 2010 View Full Article

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Title
Ru incorporation on marked enhancement of diffusion resistance of multi-component alloy barrier layers
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 509, Issue 5, Pages L85-L89
Publisher
Elsevier BV
Online
2010-11-27
DOI
10.1016/j.jallcom.2010.11.124

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