High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode
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Title
High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode
Authors
Keywords
Laser cutting, Bessel beam, Burst mode, Defocusing distance, Roughness
Journal
CERAMICS INTERNATIONAL
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2021-12-21
DOI
10.1016/j.ceramint.2021.12.182
References
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