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Title
MEMS hydrogen gas sensor with wireless quartz crystal resonator
Authors
Keywords
QCM, Hydrogen-gas sensor, MEMS, Wireless, Air-plasma, Surface oxidation
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 334, Issue -, Pages 129651
Publisher
Elsevier BV
Online
2021-02-17
DOI
10.1016/j.snb.2021.129651
References
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