High aspect ratio nanochannel machining using single shot femtosecond Bessel beams

Published 2010 View Full Article

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Title
High aspect ratio nanochannel machining using single shot femtosecond Bessel beams
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 97, Issue 8, Pages 081102
Publisher
AIP Publishing
Online
2010-08-24
DOI
10.1063/1.3479419
References
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