Effect of oxygen flow ratio on crystallization and structural characteristics of gallium oxide thin films
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Title
Effect of oxygen flow ratio on crystallization and structural characteristics of gallium oxide thin films
Authors
Keywords
β-Ga, 2, O, 3, Magnetron sputtering, Oxygen flow, Thin films, Photoluminescence
Journal
CERAMICS INTERNATIONAL
Volume 48, Issue 3, Pages 3751-3756
Publisher
Elsevier BV
Online
2021-10-25
DOI
10.1016/j.ceramint.2021.10.157
References
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