Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation
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Title
Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation
Authors
Keywords
A. Chemically assisted laser, B. Microstructures, C. Ablation, D. AlN HTCC
Journal
CERAMICS INTERNATIONAL
Volume 47, Issue 19, Pages 27598-27608
Publisher
Elsevier BV
Online
2021-06-22
DOI
10.1016/j.ceramint.2021.06.184
References
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