Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation

标题
Rapid fabrication of surface microstructures on AlN HTCC substrate by chemically assisted laser ablation
作者
关键词
A. Chemically assisted laser, B. Microstructures, C. Ablation, D. AlN HTCC
出版物
CERAMICS INTERNATIONAL
Volume 47, Issue 19, Pages 27598-27608
出版商
Elsevier BV
发表日期
2021-06-22
DOI
10.1016/j.ceramint.2021.06.184

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