A flexible high quality-factor bulk acoustic resonator enabled with transferred single-crystal piezoelectric thin film for sensing applications
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Title
A flexible high quality-factor bulk acoustic resonator enabled with transferred single-crystal piezoelectric thin film for sensing applications
Authors
Keywords
Flexible sensor, Single-crystal LiTaO, 3, Film bulk acoustic wave resonator (FBAR), Lateral field excitation
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 326, Issue -, Pages 112721
Publisher
Elsevier BV
Online
2021-04-01
DOI
10.1016/j.sna.2021.112721
References
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