Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

Published 2008 View Full Article

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Title
Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 17, Issue 7-10, Pages 1292-1296
Publisher
Elsevier BV
Online
2008-01-17
DOI
10.1016/j.diamond.2008.01.011

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