High-precision mechanical polishing method for diamond substrate using micron-sized diamond abrasive grains

Published 2019 View Full Article

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Title
High-precision mechanical polishing method for diamond substrate using micron-sized diamond abrasive grains
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 101, Issue -, Pages 107644
Publisher
Elsevier BV
Online
2019-11-27
DOI
10.1016/j.diamond.2019.107644

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