Low-Temperature Co-hydroxylated Cu/SiO2 Hybrid Bonding Strategy for a Memory-Centric Chip Architecture
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Title
Low-Temperature Co-hydroxylated Cu/SiO2 Hybrid Bonding Strategy for a Memory-Centric Chip Architecture
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 13, Issue 32, Pages 38866-38876
Publisher
American Chemical Society (ACS)
Online
2021-07-28
DOI
10.1021/acsami.1c09796
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