Argon plasma treatment on Cu surface for Cu bonding in 3D integration and their characteristics

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Title
Argon plasma treatment on Cu surface for Cu bonding in 3D integration and their characteristics
Authors
Keywords
Cu bonding, Plasma treatment, Metal surface, Ar plasma, 3D integration
Journal
APPLIED SURFACE SCIENCE
Volume 324, Issue -, Pages 168-173
Publisher
Elsevier BV
Online
2014-10-25
DOI
10.1016/j.apsusc.2014.10.098

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