Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems *
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Title
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems
*
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 31, Issue 5, Pages 054001
Publisher
IOP Publishing
Online
2021-03-30
DOI
10.1088/1361-6439/abf333
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