Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters

Title
Microstructural evolution of SiOx films and its effect on the luminescence of Si nanoclusters
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 104, Issue 9, Pages 094306
Publisher
AIP Publishing
Online
2008-11-08
DOI
10.1063/1.3006735

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