High Sensitivity of Fluorine Gas-Assisted FIB-TOF-SIMS for Chemical Characterization of Buried Sublayers in Thin Films
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Title
High Sensitivity of Fluorine Gas-Assisted FIB-TOF-SIMS for Chemical Characterization of Buried Sublayers in Thin Films
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 13, Issue 13, Pages 15890-15900
Publisher
American Chemical Society (ACS)
Online
2021-03-27
DOI
10.1021/acsami.1c01627
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