Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

Title
Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards
Authors
Keywords
AES, BAM-L200, CRM, EDX, Imaging, Lateral resolution, Sharpness, Standardisation, STXM, ToF-SIMS, XPEEM, XPS
Journal
ANALYTICAL AND BIOANALYTICAL CHEMISTRY
Volume 407, Issue 11, Pages 3211-3217
Publisher
Springer Nature
Online
2014-09-11
DOI
10.1007/s00216-014-8135-7

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