An analytical model for estimation of the stress field and cracks caused by scratching anisotropic single crystal gallium nitride

Title
An analytical model for estimation of the stress field and cracks caused by scratching anisotropic single crystal gallium nitride
Authors
Keywords
Total stress field, Single crystal gallium nitride, Median crack, Nucleation and extension, Scratch
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 122, Issue -, Pages 105446
Publisher
Elsevier BV
Online
2020-10-02
DOI
10.1016/j.mssp.2020.105446

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