Study on nucleation and propagation of median cracks generated by scratching single crystal silicon

Published 2019 View Full Article

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Title
Study on nucleation and propagation of median cracks generated by scratching single crystal silicon
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 105, Issue -, Pages 104691
Publisher
Elsevier BV
Online
2019-09-04
DOI
10.1016/j.mssp.2019.104691

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