Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives

Published 2013 View Full Article

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Title
Evaluation of subsurface damage in GaN substrate induced by mechanical polishing with diamond abrasives
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 292, Issue -, Pages 531-536
Publisher
Elsevier BV
Online
2013-12-09
DOI
10.1016/j.apsusc.2013.12.005

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