Electrochemical imprint lithography on Si surface using a patterned polymer electrolyte membrane
Published 2020 View Full Article
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Title
Electrochemical imprint lithography on Si surface using a patterned polymer electrolyte membrane
Authors
Keywords
Electrochemical imprint lithography, Liquid-electrolyte-free electrolysis, Nafion polymer electrolyte membrane, Selectively oxidation, Green process
Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 259, Issue -, Pages 124081
Publisher
Elsevier BV
Online
2020-11-25
DOI
10.1016/j.matchemphys.2020.124081
References
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