Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition
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Title
Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition
Authors
Keywords
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Journal
INORGANIC CHEMISTRY
Volume -, Issue -, Pages -
Publisher
American Chemical Society (ACS)
Online
2021-03-13
DOI
10.1021/acs.inorgchem.0c03496
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- (2008) G V Kunte et al. MEASUREMENT SCIENCE and TECHNOLOGY
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