An atomistic investigation on the wear of diamond during atomic force microscope tip-based nanomachining of gallium arsenide
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Title
An atomistic investigation on the wear of diamond during atomic force microscope tip-based nanomachining of gallium arsenide
Authors
Keywords
AFM tip-based nanomachining, MD simulation, Diamond tip wear, Single crystal gallium arsenide, Graphitization
Journal
COMPUTATIONAL MATERIALS SCIENCE
Volume 187, Issue -, Pages 110115
Publisher
Elsevier BV
Online
2020-10-30
DOI
10.1016/j.commatsci.2020.110115
References
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