Molecular dynamics study on nanometric cutting of ion implanted silicon

Published 2016 View Full Article

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Title
Molecular dynamics study on nanometric cutting of ion implanted silicon
Authors
Keywords
Nanometric cutting, Material deformation, Ion implantation, Molecular dynamics
Journal
COMPUTATIONAL MATERIALS SCIENCE
Volume 117, Issue -, Pages 240-250
Publisher
Elsevier BV
Online
2016-02-21
DOI
10.1016/j.commatsci.2016.01.040

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