An atomistic investigation on the wear of diamond during atomic force microscope tip-based nanomachining of gallium arsenide

标题
An atomistic investigation on the wear of diamond during atomic force microscope tip-based nanomachining of gallium arsenide
作者
关键词
AFM tip-based nanomachining, MD simulation, Diamond tip wear, Single crystal gallium arsenide, Graphitization
出版物
COMPUTATIONAL MATERIALS SCIENCE
Volume 187, Issue -, Pages 110115
出版商
Elsevier BV
发表日期
2020-10-30
DOI
10.1016/j.commatsci.2020.110115

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