Science and Technology of Integrated Super-High Dielectric Constant AlOx/TiOy Nanolaminates / Diamond for MOS Capacitors and MOSFETs
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Title
Science and Technology of Integrated Super-High Dielectric Constant AlOx/TiOy Nanolaminates / Diamond for MOS Capacitors and MOSFETs
Authors
Keywords
Diamond, MOSFET, Super-high dielectric constant, AlOx/TiOy nanolaminate
Journal
CARBON
Volume 172, Issue -, Pages 112-121
Publisher
Elsevier BV
Online
2020-10-09
DOI
10.1016/j.carbon.2020.10.031
References
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