Integration of high-dielectric constant Ta2O5 oxides on diamond for power devices

Title
Integration of high-dielectric constant Ta2O5 oxides on diamond for power devices
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 101, Issue 23, Pages 232907
Publisher
AIP Publishing
Online
2012-12-08
DOI
10.1063/1.4770059

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