Enhanced discharge and surface properties of TiSiCN coatings deposited by pulse-enhanced vacuum arc evaporation
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Title
Enhanced discharge and surface properties of TiSiCN coatings deposited by pulse-enhanced vacuum arc evaporation
Authors
Keywords
Pulse-enhanced vacuum arc evaporation, TiSiCN coatings, HMDSN, Target-to-substrate distance, Mechanical properties, Corrosion resistance
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 403, Issue -, Pages 126413
Publisher
Elsevier BV
Online
2020-09-16
DOI
10.1016/j.surfcoat.2020.126413
References
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