A comparative study of thick TiSiCN nanocomposite coatings deposited by dcMS and HiPIMS with and without PEMS assistance

Published 2018 View Full Article

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Title
A comparative study of thick TiSiCN nanocomposite coatings deposited by dcMS and HiPIMS with and without PEMS assistance
Authors
Keywords
TiSiCN nanocomposite coatings, Plasma enhanced magnetron sputtering (PEMS), Hot filaments, Deep oscillation magnetron sputtering (DOMS), High power impulse magnetron sputtering (HiPIMS), Ion energy, Ion flux
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 338, Issue -, Pages 84-95
Publisher
Elsevier BV
Online
2018-02-01
DOI
10.1016/j.surfcoat.2018.01.082

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