Layer formation by resputtering in Ti–Si–C hard coatings during large scale cathodic arc deposition

Published 2011 View Full Article

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Title
Layer formation by resputtering in Ti–Si–C hard coatings during large scale cathodic arc deposition
Authors
Keywords
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Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue 15, Pages 3923-3930
Publisher
Elsevier BV
Online
2011-02-12
DOI
10.1016/j.surfcoat.2011.02.007

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