Prediction of critical undeformed chip thickness for ductile mode to brittle transition in the cutting of single-crystal silicon

Title
Prediction of critical undeformed chip thickness for ductile mode to brittle transition in the cutting of single-crystal silicon
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 35, Issue 9, Pages 095010
Publisher
IOP Publishing
Online
2020-06-12
DOI
10.1088/1361-6641/ab9bee

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