Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates

Nanofabrication of 30 nm Au zone plates by e-beam lithography and pulse voltage electroplating for soft x-ray imaging

(2020) Jingyuan Zhu et al.   MICROELECTRONIC ENGINEERING

Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures

(2018) Rabia Akan et al.   RSC Advances

Zone Plates for X-Ray Focusing (Review)

(2017) V. V. Lider   Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques

Interlaced zone plate optics for hard X-ray imaging in the 10 nm range

(2017) Istvan Mohacsi et al.   Scientific Reports

Improved tungsten nanofabrication for hard X-ray zone plates

(2016) Karolis Parfeniukas et al.   MICROELECTRONIC ENGINEERING

Metal-assisted chemical etching of silicon and nanotechnology applications

(2014) Hee Han et al.   Nano Today

Fresnel zone plate stacking in the intermediate field for high efficiency focusing in the hard X-ray regime

(2014) Sophie-Charlotte Gleber et al.   OPTICS EXPRESS

Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics

(2014) Chieh Chang et al.   Nature Communications

Hard-X-ray Zone Plates: Recent Progress

(2012) Syue-Ren Wu et al.   Materials

Metal assisted chemical etching for high aspect ratio nanostructures: A review of characteristics and applications in photovoltaics

(2011) Xiuling Li   CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE

The Race to X-ray Microbeam and Nanobeam Science

(2011) G. E. Ice et al.   SCIENCE

Metal-Assisted Chemical Etching of Silicon: A Review

(2010) Zhipeng Huang et al.   ADVANCED MATERIALS

Dense high aspect ratio hydrogen silsesquioxane nanostructures by 100 keV electron beam lithography

(2010) Joan Vila-Comamala et al.   NANOTECHNOLOGY

Nanoscale X-ray imaging

(2010) Anne Sakdinawat et al.   Nature Photonics

Towards high diffraction efficiency zone plates for X-ray microscopy

(2009) S. Werner et al.   MICROELECTRONIC ENGINEERING

Direct e-beam writing of high aspect ratio nanostructures in PMMA: A tool for diffractive X-ray optics fabrication

(2009) Sergey Gorelick et al.   MICROELECTRONIC ENGINEERING

Advanced thin film technology for ultrahigh resolution X-ray microscopy

(2009) Joan Vila-Comamala et al.   ULTRAMICROSCOPY

Motility of Metal Nanoparticles in Silicon and Induced Anisotropic Silicon Etching

(2008) Kuiqing Peng et al.   ADVANCED FUNCTIONAL MATERIALS

Metal-assisted chemical etching of silicon in HF–H2O2

(2008) C. Chartier et al.   ELECTROCHIMICA ACTA