Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
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Title
Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
Authors
Keywords
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Journal
Nature Communications
Volume 5, Issue 1, Pages -
Publisher
Springer Nature
Online
2014-06-27
DOI
10.1038/ncomms5243
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