Transverse magnetic field effects on spatial electron temperature distribution in a 13.56 MHz parallel plate capacitive discharge
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Title
Transverse magnetic field effects on spatial electron temperature distribution in a 13.56 MHz parallel plate capacitive discharge
Authors
Keywords
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Journal
PHYSICS OF PLASMAS
Volume 27, Issue 3, Pages 033506
Publisher
AIP Publishing
Online
2020-03-03
DOI
10.1063/1.5118762
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