Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources

Published 2016 View Full Article

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Title
Initial evaluation and comparison of plasma damage to atomic layer carbon materials using conventional and low Te plasma sources
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 34, Issue 1, Pages 01B103
Publisher
American Vacuum Society
Online
2015-12-03
DOI
10.1116/1.4936622

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