Ion temperature and velocity in a 300 mm diameter capacitively coupled plasma reactor driven at 13, 60 and 162 MHz

Published 2010 View Full Article

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Title
Ion temperature and velocity in a 300 mm diameter capacitively coupled plasma reactor driven at 13, 60 and 162 MHz
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 19, Issue 1, Pages 015020
Publisher
IOP Publishing
Online
2010-01-08
DOI
10.1088/0963-0252/19/1/015020

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