Systematic investigation of the growth kinetics of β-Ga2O3 epilayer by plasma enhanced chemical vapor deposition

Title
Systematic investigation of the growth kinetics of β-Ga2O3 epilayer by plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 116, Issue 7, Pages 072102
Publisher
AIP Publishing
Online
2020-02-20
DOI
10.1063/1.5142196

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