Sub-20 nm patterning of thin layer WSe2 by scanning probe lithography
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Title
Sub-20 nm patterning of thin layer WSe2 by scanning probe lithography
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 16, Pages 163103
Publisher
AIP Publishing
Online
2016-10-21
DOI
10.1063/1.4965840
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