Electrical characteristics of silicon nanowire transistors fabricated by scanning probe and electron beam lithographies

Published 2013 View Full Article

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Title
Electrical characteristics of silicon nanowire transistors fabricated by scanning probe and electron beam lithographies
Authors
Keywords
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Journal
NANOTECHNOLOGY
Volume 24, Issue 31, Pages 315205
Publisher
IOP Publishing
Online
2013-07-16
DOI
10.1088/0957-4484/24/31/315205

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